WPC EVO AUTO

NBS 全自動晶圓包裝機

Features


*Fully Automated 300mm Wafer packing,unpacking and sorting
*SEMI S2/S8 Compliant- 3rd party certification
*SEMI SECSGEM300 Host Compliant
*Rorze RR756 robot with compliance, flip module and multi chamber      wafer handling end effector
*2-Rorze RV-201 Linear FOUP/FOSB LP with RFID
*E84 FOUP/FOSB Transfer to RV201 LP
*Single Stocker with 1- RV-201 LP and light curtain configured for              proprietary HWS Carrier
*Automated HWS lid removal/replacement
*Automated HWS transfer stage
*Bulk and singulated transfer of HWR300 wafer ring separators from        Entegris HWS300C
*Baumer Camera detection of packing media
*ISO Class 7 at 0.5 micron Mini Environment
*Run Rate: Single HVWS - 125 WPH Minimum
*Footprint: 1526mm D x 2636mm W

與我聯繫