WPC EVO2 AUTO

NBS 全自動晶圓包裝機

Features


* Packing, Unpacking, Sorting
* Supports Fully Automated Operation
* Automatic Sliding HWS LP Drawer
* Deep LP drawer for tall (ring separators) HWS
* Retractable HWS LP drawer front – AGV access
* Light Curtain over HWS LP Drawer
* Auto HWS lid removal/replacement
* E-84 PIO sensors for HWS AGV transfer and FOUP AGV/OHT transfer
* Class 1 (0.1µ) environment
* Complete management of HWS media
* Wafer ring separator - bulk transfer mode
* Supports “ballroom” or “through wall - bay/chaise” fab layouts
* CE, NFPA79, SEMI F47, S2, S8 3rd party certified
* SECS/GEM300 Compliant

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